We present a self-driving physical vapor deposition system that uses a custom Bayesian machine learning algorithm to learn recipes for parametric beamsplitter fabrication, making sample-specific decisions on the fly.
@article{zheng2025selfdriving,title={A self-driving physical vapor deposition system making sample-specific decisions on the fly},author={Zheng, Y.B. and Blake, C. and Mravac, L. and others},journal={npj Computational Materials},volume={11},pages={327},year={2025},month=nov,day={5},doi={10.1038/s41524-025-01805-0},}